XY Stage Driver Having Locking Device and Data Storage System Having the X-Y Stage Driver

Inventor

H. Park, J. Shim, S. Hong, D. K. Min

Code 1

US 7,459,809 (2008)(issued)

Code 2

JP 4435188B2 (2010)(issued)

Code 3

CN 100590953C (2010)(issued)

Code 4

KR 0773545 (2007)(issued)