Method of Fabricating Micro Actuator Having Media Stage Inventor H. Park, J. Shim, S. Hong Code 1 US 7,520,998 (2009)(issued) Code 2 JP 2006-379120 (2006)(filed) Code 3 CN 1988018 (2007)(filed) Code 4 KR 0707207 (2007)(issued) 목록 이전글Method of Reproducing Information using Semiconductor Probe and Device adopting the Semiconductor Probe 17.03.24 다음글Semiconductor Probe With High Resolution Resistive Tip Having Doping Control Layer and Method of Fabricating the Same 17.03.24