Semiconductor Probe With High Resolution Resistive Tip Having Doping Control Layer and Method of Fabricating the Same

Inventor

J. Jung, J. S. Kim, H. C. Shin, S. Hong

Code 1

US 7,602,202 (2009)(issued)

Code 2

JP 4101851 (2008)(issued)

Code 3

KR 0738098 (2007)(issued)