XY Stage Module, Storage System Employing the Same, and the Method for Fabricating the XY Stage Module

Inventor

H. Park, J. Jung, S. Hong, D. K. Min

Code 1

US 7,316,072 (2008)(issued)

Code 2

JP 2006-329819 (2006)(filed)

Code 3

CN 101000800B (2010)(issued)

Code 4

KR 0682957 (2007)(issued)