Semiconductor Probe with High Resolution Resistive Tip and Method of Fabricating the Same

Inventor

J. Jung, J. Kim, H. Shin, S. Hong

Code 1

US 7,287,421 (2007)(issued)/US 7,828,981 (2010)(issued)

Code 2

JP 4373418B2 (2009)(issued)

Code 3

KR 0785006 (2007)(issued)