Two Axis Actuator with Large Stage

Inventor

K. L. Baeck, J. -U. Jun, J. -H. Jung, S. Hong, D. K. Min, H. S. Park

Code 1

US 7,142,077 (2006)(issued)

Code 2

JP 4102343 (2008)(issued)

Code 3

EP 1,508,964 (2009)(issued)

Code 4

KR 0552686 (2006)(issued)