Two-axis micro-actuator with multidimensional actuation with large area stage

Inventor

K. L. Baeck, J. -U. Jun, J. -H. Jung, S. Hong

Code 1

US 7,247,968 (2007)(issued)

Code 2

EP 1,508,963 (2005)(issued)

Code 3

JP 4084781 (2008)(issued)

Code 4

KR 0552687 (2006)(issued)