Integration of piezoelectric aluminum nitride and ultrananocrystalline diamond films for implantable biomedical microelectromechanical devices

Author

M. Zalazar, P. Gurman, J. Park, D. Kim, S. Hong, L. Stan, R. Divan, D. Czaplewski, and O. Auciello*

Journal

Applied Physics Letters

Vol

102 (10)

Page

104101

Year

2013

Link

https://doi.org/10.1063/1.4792238 905회 연결