Size effect of flexible proof mass on the mechanical behavior of micron-scale cantilevers for energy harvesting applications

Author

M. Kim*, S. Hong, D. J. Miller, J. Dugundji, B. L. Wardle

Journal

Applied Physics Letters

Vol

99 (24)

Page

243506

Year

2011

Link

https://doi.org/10.1063/1.3663858 811회 연결