Electron holography study for two-dimensional dopant profile measurement with specimens prepared by backside ion milling

Author

J. H. Yoo*, J.-M. Yang, S. Ulugbek, C. W. Ahn, W.-J. Hwang, J. K. Park, C. M. Park, S. Hong, J. J. Kim, and D. Shindo

Journal

Journal of Electron Microscopy

Vol

57 (1)

Page

13-18

Year

2008

Link

https://doi.org/10.1093/jmicro/dfm037 549회 연결