Measurement and Visualization of Doping Profile in Silicon Using Kelvin Probe Force Microscopy (KPFM)

Author

H. Shin*, B. Lee, C. Kim, H. Park, D.-K. Min, J. Jung, S. Hong, and S. Kim

Journal

Electronic Materials Letters

Vol

1 (2)

Page

127-133

Year

2005

Link

https://scholar.google.co.kr/scholar?hl=ko&as_sdt=0%2C5&q=Measurement+… 584회 연결