Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

Author

J. Lee, H. Shin, S. Kim, S. Hong, J. Chung, H. Park and J. Moon

Journal

Japanese Journal of Applied Physics

Vol

42

Page

1171-1174

Year

2003

Link

https://doi.org/10.1143/JJAP.42.L1171 608회 연결