Fabrication and Investigation of Ultra-Thin and Smooth Pb(Zr,Ti)O3 Films for Miniaturization of Microelectronics Devices

Author

J. Hong*, H. W. Song, S. Hong, H. Shin, K. No

Journal

Journal of Applied Physics

Vol

92

Page

7434-7441

Year

2002

Link

https://doi.org/10.1063/1.1524307 508회 연결