Quantitative analysis of the bit size dependence on the pulse width and pulse voltage in ferroelectric memory devices using atomic force microscopy

Author

J. Woo, S. Hong*, N. Setter, H. Shin, J. U. Jeon, Y. E. Pak and K. No

Journal

Journal of Vacuum Science & Technology B

Vol

19

Page

818-824

Year

2001

Link

https://doi.org/10.1116/1.1364697 731회 연결