Large-area Uniform 1-nm-level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A 'Next-generation' Cu Diffusion Barrier?

Author

Yun-Ho Kang, Sangbong Lee, Youngwoo Choi, Won Kyung Seong, Kyu Hyo Han, Jang Hwan Kim, Hyun-Mi Kim, Seungbum Hong, Sun Hwa Lee, Rodney S. Ruoff, Ki-Bum Kim, Sang Ouk Kim

Journal

Advanced Materials

Vol

34 (15)

Page

2110454

Year

2022

Link

https://doi.org/10.1002/adma.202110454 1211회 연결