Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation

Author

Hyunjin Joh, Gopinathan Anoop, Won-June Lee, Dipjyoti Das, Jun Young Lee, Tae Yeon Kim, Hoon Kim, WooJun Seol, Jiwon Yeom, Sanghun Jeon, Seungbum Hong, Myung-Han Yoon*, Ji Young Jo*

Journal

ACS Applied Electronic Materials

Vol

3 (3)

Page

1244-1251

Year

2021

Link

https://doi.org/10.1021/acsaelm.0c01065 1148회 연결