Atomic layer deposition of environmentally benign SnTiOx as a potential ferroelectric material

Author

S. Chang, S. K. Selvaraj, Y.-Y. Choi, S. Hong, S. Nakhmanson, and C. G. Takoudis*

Journal

Journal of Vacuum Science & Technology A

Vol

34 (1)

Page

01A119

Year

2016

Link

https://doi.org/10.1116/1.4935650 901회 연결