Effects of Gas Ring Position and Mesh Introduction on Film Quality and Thickness Uniformity

Author

S. Hong*, E. Kim, Z. -T. Jiang, B. -S. Bae, S. -C. Lim, S. -G. Woo, Y. -B. Koh and K. No

Journal

Materials Science and Engineering: B

Vol

45

Page

98-101

Year

1997

Link

https://doi.org/10.1016/S0921-5107(96)01913-7 759회 연결